Plasma Gun : F4-VB(55 kW)
Dc Power supply
- Maximum 1,000 A current
- Maximum power of 80 kW at 100% duty cycle
Chamber
- 1,800 mm(D) x 2,350 mm(L)
Manipulator
- Plasma Gun Handling : 6 axes robot
- Substrate Handling: 1 axis turntable (5~30 rpm)
- Max. Sample size : 1,200 mm
Powder feeder
- Twin volumetric powder feeder
- Particle size: 4 to 200 um
- Accuracy: ±2% (of maximum value)
Vacuum pump
- Pressure control range: 30 ~ 900 mbar
- Rotary pump(1)+Roots blower(2)
- 제조사 : Sulzer Metco(Switzerland)
- 설치일 : 2014. 03
- 담당자 : 김호석
- 연락처 : 070-4272-2752